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Shared Research Operations Facilities

• Analysis Research Service Center
  • FEI Scanning Electron Microscope (SEM)
  • JEOL SEM
  • Talos TEM
  • X-ray Diffractometer (XRD)
  • Nexsa XPS
  • Dynacool PPMS
  • Raman-AFM
  • Hirox Digital Microscope
  • Bio-Rad
  • Allied Grinder/Polisher
  • Paraffin Embedding Center
  • Inductively Coupled Plasma Mass Spectrometer (ICP-MS)
  • X-Ray Fluorescence Spectrometer (XRF)
  • Ellipsometer
  • Tissue Processor
  • Mercury Intrusion Porosimeter
• Nanofabrication Research Service Center
  • Oxford ICP/RIE
  • AJA Magnetron Sputter
  • Ebeam Evaporator
  • PEALD
  • PECVD
  • SuSS MJB4 Contact Aligner
  • Rapid Thermal Annealer (RTA/RTP)
  • PE-50 O2 Plasma Asher
  • Xanthos Hood
  • Probe Station (Zeus)
  • Oxidation Furnace-Wet/Dry
  • Teaching Bay Diffusion Furnace (MRL P-Type)
  • Teaching Bay Diffusion Furnace (MRL N-Type)
  • Hydra Wet Hood
  • Chimera Wet Hood
  • Wafer Bonder
  • 3-Zone Tube Furnace
  • Axiotron Microscope
  • F-20 Filmetrics
  • HMDs Oven
  • Oxidation Furnace - Dry
  • Teaching Bay - Etch Station
  • Teaching Bay - Lithography Station
  • Teaching Bay - PVD
  • Teaching Bay - SS Hood
  • Vacuum Oven
• Repair Hub
• Liquid Nitrogen (LN2)
• Epitaxy Research Shared Space
  • Contactless Mobility
  • In-Situ XPS
  • Antimonide Chamber
  • Arsenide Chamber
  • Telluride Chamber
  • High-k Dielectric
  • IV-VI Compound Semiconductor
  • Crystalline Oxides

Shared Research Operations Team

Forms

• SRO Request for Information
• SRO Repair Hub request

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Frequently Asked Questions

Shared Research Operations Publications List