Antimonide Chamber

Description

Dedicated to growth of compound semiconductors for high-speed electronics and optoelectronic device applications. Sources include Be, In, As, GaTe, Ga, Si, Sb, Al effusion cells. RHEED is used for growth rate and composition determination and for monitoring the crystal structure during deposition. Examples of device structures include PHEMT, LEDs, lasers, optical modulators, and high-efficiency multifunction photovoltaic solar cells.