3-Zone Tube Furnace

Description

The 3-Zone tube furnace is a custom system intended for flexible annealing or chemical vapor deposition processing at temperatures < 1000oC.  Process and/or purge gases (Ar, 4%H2 in Ar, N2) are introduced via a manifold into the quartz tube at either atmospheric or sub-atmospheric pressures.  The maximum sample size is 60mm (~2"). 

Capabilities

• Offers users flexible annealing and chemical vapor deposition
• Allows sizes up to 60mm (2”)
• Manifold for simple gas delivery