Hydra Wet Hood

Description

Hydra is our 8ft Kewaunee fume hood.  This wet bench is used to house dedicated wafer/sample processing in one of two spinners for standard wafer cleans (H2SO4, NH4OH, HCl, H2O2, HF) and III-V substrate pre-epi cleans (Br, HCl, Methanol).

Capabilities

• Dedicated spin processor for standard wafer cleans (H2SO4, NH4OH, HCl, H2O2, HF)
• Dedicated spin processor for III-V substrate pre-epi cleans (Br, HCl, Methanol)