PE-50 O2 Plasma Asher

Description

Our PE-50 Plasma Asher utilizes a 100W 13.56MHz power supply with auto-matching network in a direct contact parallel plate configuration for uniform plasma generation.  Samples up to 5" in diameter can be exposed to two different ionized gas species (O2, arranged by request) for high-rate etching of polymers, photo-resist, and other materials as well as for plasma cleaning and surface modification.