AJA Magnetron Sputter

Description

Our AJA International, Inc. ATC Orion is a thin film deposition system based on the physical ablation of target material by five (2RF/3DC) independently powered magnetron sputter sources.  Substrates with a maximum diameter of 100mm are load lock transferred to the main chamber on a Molybdenum substrate holder with a variety of features including heating, rotation, Z motion, and RF biasing. The main chamber vacuum system consists of a turbo-molecular pump, gate valve, mechanical pump, and 3 vacuum gauges.  A quartz crystal monitor may be employed internally for rate calibration. Internal interlocks protect the system/user from aberrant power, water, and vacuum states.  Labview-based computer control allows for process development and automated sequencing.

Capabilities

• Permits samples up to 100mm in size
• QCM for rate calibration
• Substrate heating up to 800oC
• Co-deposition from up to 5 sources (2RF, 3DC)
• Deposition of (most) transition metals and compounds