Ebeam Evaporator

Description

Our Angstrom Engineering EvoVac is a thin film deposition system based on evaporation of source material that can deposit a wide range of materials including metals and inorganic compounds.  Resistive evaporation results when electrical current heats a boat filled with source material whereas electron beam evaporation utilizes filament emission and magnetic focusing of a high energy electron beam which is swept within a crucible of deposition material.  The deposition processes occur in a vacuum to permit long mean free paths from indexed multi-pocket sources at rates and terminal thicknesses controlled using a quartz rate sensor.  The substrate can be heated, rotated, and plasma cleaned to control film morphology, uniformity, and adhesion.

Capabilities

• Sample stage is 150mmx150mm
• Shadow mask and sample retainers attach directly to the sample stage
• Load lock for high throughput