X-ray Diffractometer (XRD)

Description

Our Rigaku SmartLab X-ray Diffractometer (XRD) is utilized to probe the crystalline structure of matter to determine thickness, composition, relaxation, strain, area uniformity, density, roughness, phase, crystalline texture, % crystallinity, and pore/grain size of both thin films and powder samples.  The software intelligently guides users through both data acquisition and analysis.  This system also features specialized hardware including: x-y stage for mapping samples, small angle x-ray scattering vacuum path, domed hot stage capable of reaching 1100 degrees C, and 2D detector.

Capabilities

• Maximum sample size                      150 mm Wafer
• Thickness                                              3.5 mm