Inductively Coupled Plasma Mass Spectrometer (ICP-MS)

Plasma SPEC


Triple quadrupole ICP-MS is a type of tandem mass spectrometer used for elemental analysis. ICP-QQQ uses an additional quadrupole mass filter (Q1) before the collision/reaction cell (CRC), so spectral interferences can be resolved using reactive cell gases as well as helium (He) collision mode. To give high ion transmission at unit (1 u) mass resolution, both quadrupoles of an ICP-QQQ must be operated under high vacuum. ICP-MS/MS is most beneficial for advanced applications that cannot be run successfully on single quadrupole ICP-MS. These applications may require extremely low detection limits, for example measuring ultratrace contaminants in semiconductor process chemicals and high purity materials or detecting the smallest nanoparticles. ICP-QQQ can use MS/MS to resolve isobaric, doubly charged, and adjacent mass overlaps as well as intense polyatomic interferences. This capability allows low level analysis of unusual analytes such as Si, P, S, Cl, and even F.


  • Reaction chemistry resolves isobaric overlaps, which are beyond the capability of high-resolution ICP-MS
  • Ultra High Matrix Introduction (UHMI) technology tolerates samples with up to 25% total dissolved solids (TDS)

Manager: Jacob Armitage,
Backup: Dr. Casey Smith,
Manufacturer, Model: Agilent 8900 Triple Quadrupole ICP-MS