Cronus

Description

Cronus is a shielded semiautomatic probestation that allows for an exceptional noise floor for low level voltage/current and capacitance measurements. The microscope and sample chuck translate independently of a platen stage that holds up to 6 (six) kelvin-compatible micropositioners used to contact patterns on the sample surface. The sample chuck can be temperature controlled from -60 to 300°C. Intelligent image recognition and wafer mapping allow for automated measurements across the entire device set on lithographically patterned samples. The Keysight B1500A parameter analyzer hosts several modules for measuring sample I/V and C/V characteristics. A switch matrix enables seamless transition between I/V and C/V measurements without the need for recabling. The user interacts with the B1500A via the EasyExpert graphical user interface (GUI). The WGFMU module offers the combination of arbitrary linear waveform generation with synchronized fast current or voltage (I/V) measurement. It allows the user to generate not only DC, but also various types of AC waveforms. In addition to this versatile sourcing capability, the WGFMU can also perform measurement in synchronization with the applied waveform enabling accurate high-speed IV characterization.

Capabilities

Probestation:

• Max wafer size: 200 mm (8 in)
• Chuck temperature range:
  • -60°C to 300°C, air cool
• MicroChamber for dark, dry and enhanced EMI-shielding enclosure
• Up to 6 kelvin-compatible micropositioned probes
• Precision 4-axis motorized stage
• XY-Stage:
  • Travel 203 mm x 203 mm (8 in x 8 in)
  • Resolution 1 μm (0.04 mils), Repeatability ≤ 2 μm (0.08 mils)
• Z Stage:
  • Travel 5 mm (0.19 in.)
  • Resolution 1 μm (0.04 mils), Repeatability ≤ 1 μm (0.04 mils)
• Theta Stage
  • Travel ± 5.5°
• Spectral noise floor: ≤ -170  dBVrms/rtHz (≤ 1 MHz)
• System AC noise: ≤ 5 mVp-p  (≤ 1 GHz)

Semiconductor analyzer:

• 1x MFCMU - Multi-frequency capacitance measurement unit B1520A
  • Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-q, Y-q
  • Frequency: 1 kHz to 5 MHz, Resolution: 1 mHz (minimum), Accuracy: ±0.008%
  • Output signal level: 10 mVrms to 250 mVrms, Resolution: 1 mVrms
  • DC Bias Range: 0 to ±25 V, Resolution: 1 mV
• 2x HRSMU - High resolution source/monitor unit B1517A
  • Max current: 100 mA (V ≤ 20 V), 50 mA (20 V < V ≤ 40 V), 20 mA (40 V < V ≤ 100 V)
  • Range/Resolution:
  • Range/Resolution: from  ±10 pA/1 fA  to  ±100 mA/5 μA
• 2x HPSMU - High power source/monitor unit B1510A
  • Max current: 1A (V ≤ 20V), 500 mA (20V < V ≤ 40V), 125 mA (40V < V ≤ 100V), 50mA (100V < V ≤ 200V)
  • Range/Resolution: from ±2 V/2 μV to ±200 V/200 μV
  • Range/Resolution: from ±1 nA/10 fA to ±1 A/ 1 μA
• 1x WGFMU - Waveform generator/fast measurement unit B1530A
  • Offering the combination of arbitrary linear waveform generation (ALWG) with synchronized fast current or voltage (IV) measurement. Enables accurate high-speed IV characterization
  • Fast IV mode/DC mode: Max voltage output: +10 V, -10 V, ±5 V, Max current  range: 1 μA to 10 mA
  • PG mode: Max voltage output: ±5 V (open load), ±2.5 V (50Ω load)
  • SMU pass-through: Up to ±25 V, ±100 mA
  • Waveform programming minimum timing resolution: 10 ns
  • Sampling rate 200MSa /s
  • 4 M data points/channel,
  • Averaging per a measurement point: 10 ns to 20 ms with 10 ns resolution