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College of Science and Engineering Shared Research Operations
Texas State College of Science and Engineering Shared Research Operations Facilities Epitaxy RSC

Epitaxy RSC

ERSC Mission and Objectives

The Epitaxy Research Service Center (ERSC) is located in the Roy F. Mitte (RFM) building and contains a unique set of equipment all designed to grow crystalline thin films in a process called heteroepitaxy. The two main types of systems utilized to grow these thin films are a high vacuum Molecular Beam Epitaxy (MBE) multi-chamber cluster and a high temperature Metalorganic Chemical Vapor Deposition (MOCVD) reactor. These systems are typically segregated by material family to prevent cross contamination and allow our researchers to experiment with a large portion of the periodic table in search of new functional semiconductor and oxide materials.

 

Please follow this hyperlink view the current MBE Cluster configuration

Antimonide Chamber

Antimonide Chamber